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      新聞詳情

        半導體FAB廠氣體相關知識(上)

      • 來源: 時間:2019-7-10 17:44

      何謂半導體?

      答:半導體材料的電傳特性介于良導體如金屬(銅、鋁,以及鎢等)和絕緣和橡膠、塑料與干木頭之間。最常用的半導體材料是硅及鍺。半導體最重要的性質之一就是能夠藉由一種叫做摻雜的步驟刻意加入某種雜質并應用電場來控制其之導電性。

      常用的半導體材料為何?

      答:硅(Si)、鍺(Ge)和砷化家(AsGa)

      何謂VLSI?

      答:VLSI(Very Large Scale Integration)超大規模集成電路

      在半導體工業中,作為絕緣層材料通常稱什么?

      答:介電質(Dielectric)

      薄膜區機臺主要的功能為何?

      答:沉積介電質層及金屬層

      何謂CVD(Chemical Vapor Dep.)?

      答:CVD是一種利用氣態的化學源材料在晶圓表面產生化學沉積的制程

      介電材料的作用為何?

      答:做為金屬層之間的隔離

      何謂PMD(Pre-Metal Dielectric)

      答:稱為金屬沉積前的介電質層,其界于多晶硅與第一個金屬層的介電質。

      何謂TEOS?

      答:Tetraethoxysilane用途為沉積二氧化硅

      TEOS在常溫時是以何種形態存在?

      答:液體

      二氧化硅其K值為3.9表示何義?

      答:表示二氧化硅的介電質常數為真空的3.9倍。

      氟在CVD的工藝上,有何應用?

      答:作為清潔反應室(Chamber)用之化學氣體

      在FAB內,間接物料指哪些?

      答:Gas氣體, Chemical 酸、堿化學液 ,PHOTO Chemical 光阻、顯影液 ,Slurry 研磨液,Target 靶材, Quartz 石英材料 ,Pad & Disk 研磨墊, Container 晶舟盒(用來放芯片), Control Wafer 控片 ,Test Wafer測試、實驗用的芯片。

      Yield(良率)會影響成本嗎?如何影響?

      答:Fab yield= 若無報廢產生,投入完全等于產出,則成本耗費最小CP Yield:CP Yield 指測試一片芯片上所得到的有效的IC數目。當產出芯片上的有效IC數目越多,即表示用相同制造時間所得到的效益愈大.

      根據工藝需求排氣分幾個系統?

      答:分為一般排氣(General)、酸性排氣(Scrubbers)、堿性排氣(Ammonia)和有機排氣(Solvent) 四個系統。

      何種氣體由VMB Stick點供到機臺?

      答:H2

      何種氣體有自燃性?

      答:SiH4

      何種氣體具有腐蝕性?

      答:ClF3

      當機臺用到何種氣體時,須安裝氣體偵測器?

      答:PH3

      名詞解釋GC, VMB, VMP?

      答:GC- Gas Cabinet 氣瓶柜VMB- Valve Manifold Box 閥箱,適用于危險性氣體。VMP- Valve Manifold Panel 閥件盤面,適用于惰性氣體。

      標準大氣環境中氧氣濃度為多少?工作環靜氧氣濃度低于多少時人體會感覺不適?

      答:21%19%

      什幺是氣體的LEL?H2的LEL 為多少?

      答:LEL- Low Explosive Level 氣體爆炸下限H2 LEL- 4%.

      當FAB內氣體發生泄漏二級警報(既Leak HiHi),氣體警報燈(LAU)會如何動作?FAB內工作人員應如何應變?

      答:LAU紅、黃燈閃爍、蜂鳴器叫聽從ERC廣播命令,立刻疏散。

      什幺是WPH?

      答:WPH(wafer per hour) 機臺每小時之芯片產出量

      FAB內的主要生產區域有那些?(有7個)

      答:黃光, 蝕刻, 離子植入, 化學氣象沉積, 金屬濺鍍, 擴散, 化學機械研磨

      Fab內的滅火器為那一類?

      答:CO2類

      為什幺FAB必須使用CO2類的滅火器?

      答:因為CO2無干粉滅火器產塵的顧忌

      如果不依垃圾分類原則來丟垃圾會有什幺后果?

      答:可能造成無塵室的火災危機,因為酸堿中和,產生熱后可能引起火災

      何為光阻?其功能為何?其分為哪兩種?

      答:Photoresist(光阻)。是一種感光的物質,其作用是將Pattern從光罩(Reticle)上傳遞到Wafer上的一種介質。其分為正光阻和負光阻。

      什幺是曝光?什幺是顯影?

      答:曝光就是通過光照射光阻,使其感光;顯影就是將曝光完成后的圖形處理,以將圖形清晰的顯現出來的過程。

      何謂Photo?

      答:Photo=Photolithgraphy,光刻,將圖形從光罩上成象到光阻上的過程。

      何為BARC?何為TARC?它們分別的作用是什幺?

      答:BARC=Bottom Anti Reflective Coating, TARC=Top Anti Reflective Coating. BARC是被涂布在光阻下面的一層減少光的反射的物質,TARC則是被涂布在光阻上表面的一層減少光的反射的物質。他們的作用分別是減少曝光過程中光在光阻的上下表面的反射,以使曝光的大部分能量都被光阻吸收。

      現在的生產線上, 曝光機的光源有幾種, 波長多少?

      答:有三種:高壓汞燈光譜中的365nm 譜線, 我們也稱其為I-line; KrF 激光器, 產生248 nm 的光; ArF 激光器, 產生193 nm 的光; 

      我們可否一直把波長縮短,以提高分辨率?困難在哪里?

      答:不可以。困難在透鏡材料。能透過157nm 的材料是CaF2, 其晶體很難生長。還未發現能透過更短波長的材料。

      為什幺光刻區采用黃光照明?

      答:因為白光中包含365nm成份會使光阻曝光,所以采用黃光; 就象洗像的暗房采用暗紅光照明。

      什幺叫一個Die?

      答:一個Die也叫一個Chip;它是一個功能完整的芯片。一個Field可包含多個Die;

      為什幺曝光機的綽號是“印鈔機”?

      答:曝光機 很貴;一天的折舊有3萬-9萬人民幣之多;所以必須充份利用它的產能,它一天可產出1600片WAFER。

      什幺是DUV SCANNER?

      答:DUV SCANNER 是 指所用光源為Deep Ultra Voliet, 超紫外線.即現用的248nm,193nm Scanner

      光阻種類有多少?

      答:光阻種類有很多.可根據它所適用的曝光波長分為I-line光阻,KrF光阻和ArF光阻

      廠務供氣系統中何謂 Bulk Gas ?

      答:Bulk Gas 為大氣中普遍存在之制程氣體, 如 N2, O2, Ar 等.

      廠務供氣系統中何謂Inert Gas?

      答:Inert Gas 為一些特殊無強烈毒性的氣體, 如 CF4, CHF3, SF6 等.

      廠務供氣系統中何謂Toxic Gas ?

      答:Toxic Gas 為具有強烈危害人體的毒性氣體, 如 SiH4, Cl2, BCl3 等.

      N2氮氣(NITROGEN)?

      空氣中約4/5是氮氣。氮氣勢一安定之惰性氣體,由于取得不難且穩定,故Fab內常用以當作Purge管路,除去臟污、保護氣氛、傳送氣體(Carrier Gas)、及稀釋(Dilute)用途。另外,氮氣在零下196℃(77F)以下即以液態存在,故常被用作真空冷卻源。現在Fab內Clean House用之氮氣為廠務提供99.999﹪純度者,生產線路所用之氮氣為更高純度者。

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